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Carbon nanostructures synthesis in microwave plasma torch at atmospheric pressure

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JAŠEK Ondřej ELIÁŠ Marek ZAJÍČKOVÁ Lenka KUČEROVÁ Zuzana MATĚJKOVÁ Jiřina REK Antonín BURŠÍK Jiří

Rok publikování 2006
Druh Článek ve sborníku
Konference Book of Abstracts 3rd International conference on microwave chemistry
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
Obor Fyzika plazmatu a výboje v plynech
Klíčová slova carbon nanostructures; atmospheric pressure; microwave discharge; electron microscopy
Popis We have successfully synthesized CNTs in microwave plasma torch at atmospheric pressure from the mixture of methane, hydrogen and argon. The plasma torch was generated at the frequency of 2.45 GHz using an iron hollow electrode. Argon (1000 sccm) was flowing through the electrode whereas methane (10-40 sccm) and hydrogen (100-400 sccm) were added to the expanding torch from outside. The CNTs were grown on substrates placed at various distances from the torch electrode. The substrates were silicon wafers(10x15 mm) with deposited 200 nm thick silicon oxide layer and thin layer (5-20 nm) of iron catalyst on the top. The samples were imaged by scanning electron microscopy(SEM) and transmission electron microscopy(TEM). The processes in the discharge were monitored by optical emission spectroscopy(OES). The SEM analysis showed presence of well aligned 50 micrometer long multi-wall CNTs with narrow diameter distribution centered around 20 nm. Except the carbon nanotubes the layers often contained various carbon and carbon/iron structures.
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