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Evaluation of composition, mechanical properties and structure of nc-TiC/a-C:H coatings prepared by balanced magnetron sputtering

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SOUČEK Pavel SCHMIDTOVÁ Tereza ZÁBRANSKÝ Lukáš BURŠÍKOVÁ Vilma VAŠINA Petr CAHA Ondřej JÍLEK Mojmír EL MEL Abdelazziz TESSIER Pierre-Yves SCHÄFER Jan BURŠÍK Jiří PEŘINA Vratislav MIKŠOVÁ Romana

Rok publikování 2012
Druh Článek v odborném periodiku
Časopis / Zdroj Surface & Coatings Technology
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
www https://www.sciencedirect.com/science/article/pii/S0257897211008875?via%3Dihub
Doi http://dx.doi.org/10.1016/j.surfcoat.2011.09.012
Obor Fyzika plazmatu a výboje v plynech
Klíčová slova Carbon; Magnetron sputtering; Mechanical properties; Nanocomposite; Titanium
Popis Nanocomposites like nc-TiC/a-C:H show promising combinations of properties such as high hardness and Young's modulus combined with low friction and wear. These properties can be furthermore tailored to suit particular industrial needs. In this paper, we report on the preparation and analyses of several um thick and well adherent nc-TiC/a-C:H coatings with different stoichiometry. These coatings were deposited in a relatively low ion bombardment environment using magnetron sputtering of titanium target operated in well-balanced magnetic field configuration on high speed steel and hardmetal substrates. Gaseous hydrocarbon (acetylene) was added to the deposition chamber as source of carbon. Hardness and Young's modulus of 46 GPa and 415 GPa respectively were reached.
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